SEM/FIB is multifunctional instrument for observation and modification of the surface allowing to study the morphology and topography of materials in micrometric/nanometric scale. The Gas Injection System (GIS) allows localized deposition or etching of materials on the surface (Pt, C, W, XeF2, H2O). The instrument is equipped with ESD for elemental analysis of the sample. The instrument provides the possibility to prepare TEM lamella for samples for a wide range of materials.
Image of lamella cut from the thin film