Scanning Electron Microscopy with Focused Ion Beam (SEM/FIB)

SEM/FIB is a multifunctional instrument for observation and modification of surfaces, enabling to study the morphology and topography of materials in micrometric/nanometric scale. The Gas Injection System (GIS) allows localized deposition or etching of materials on the surface (Pt, C, W, XeF2, H2O). The instrument is equipped with ESD for an elemental analysis of the sample. The instrument enables to prepare TEM lamellas for samples of a wide range of materials.

Image of lamella cut from the thin film